GR5 Titanium Metal Sheet Forsemiconductors
GR5 Titanium Sheet is an alpha + beta duplex titanium alloy with titanium, aluminum and vanadium as its main components.
Description
GR5 titanium sheet has a wide range of applications in the semiconductor industry due to its excellent mechanical properties, corrosion resistance and machinability. These properties make GR5 rectangular titanium sheet one of the key materials commonly used in semiconductor manufacturing equipment.
Industry Leading GR5 Titanium Alloy Sheet Production Technology
|
Property |
Typical Value |
|
Density g/cm3 (lb/ cu in) |
4.42 (0.159) |
|
Melting Range °C±15°C (°F) |
1649 (3000) |
|
Specific Heat J/kg.°C (BTU/lb/°F) |
560 (0.134) |
|
Volume Electrical Resistivity ohm.cm (ohm.in) |
170 (67) |
|
Thermal Conductivity W/m.K (BTU/ft.h.°F) |
7.2 (67) |
|
Mean Co-Efficient of Thermal Expansion 0-100°C /°C (0-212°F /°F) |
8.6x10-6 (4.8) |
|
Mean Co-Efficient of Thermal Expansion 0-300°C /°C (0-572°F /°F) |
9.2x10-6 (5.1) |
|
Beta Transus °C±15°C (°F) |
999 (1830) |
Specific applications of GR5 thin titanium sheet in the semiconductor industry:
Etch Cavities: GR5 titanium sheet is used to fabricate cavities in plasma etching equipment. These cavities are subjected to high temperatures and highly corrosive environments, and GR5 titanium sheet provides excellent corrosion resistance and stability.
Reaction chambers: GR5 titanium sheet is used to create reaction chambers in CVD equipment. These chambers are subjected to high temperatures and chemical gases, and GR5 titanium sheet maintains good performance in this environment.
Shields and Components: Shields and other components in PVD equipment are also commonly made of GR5 titanium sheet to protect the interior of the equipment from contamination and damage.
Large Scale Factory Production of GR5 Industrial Titanium Sheet
Why Choose Us for GR5 Sheet
GNEE has 16 years of experience in titanium products and exports. The company is headquartered in Henan Province, China. The company is adjacent to the Beijing-Hong Kong-Macao Expressway and has more than 200 employees who are dedicated to the company. The company has a registered capital of 10 million RMB and covers an area of more than 350,000 square metres. The company has passed SGS certification.
We provide high quality products, good service and competitive price. We have been committed to producing titanium tubes, titanium sheets, titanium foils, titanium wires, titanium rods and so on.
Our products are exported to more than 150 countries and have entered key industries such as petroleum, chemical, medical, automotive, large power station, aerospace and so on.
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